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Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon

Identifieur interne : 000D07 ( Main/Repository ); précédent : 000D06; suivant : 000D08

Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon

Auteurs : RBID : Pascal:13-0129395

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Abstract

In this paper we present a design as well as the fabrication procedure of a new type of electro-optical modulator based on plasma dispersion effect. The device consists from a regular single mode silicon waveguide and periodically patterned electrodes made out an indium thin oxide (ITO) located along both sides of the optical core through which the photonic signal is propagating. By applying voltage on the electrodes a periodic change in the free electrons is occurred along the optical core. This change affects both the imaginary and real part of the refractive index resulting in the generation of periodic change in the refractive index that creates an effective Bragg reflector. Different fabrication strategies are reported.

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Pascal:13-0129395

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<record>
<TEI>
<teiHeader>
<fileDesc>
<titleStmt>
<title xml:lang="en" level="a">Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon</title>
<author>
<name sortKey="Shahmoon, Asaf" uniqKey="Shahmoon A">Asaf Shahmoon</name>
<affiliation wicri:level="1">
<inist:fA14 i1="01">
<s1>School in Advanced Optical Technologies (SAOT)</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Allemagne</country>
<wicri:noRegion>91052</wicri:noRegion>
<wicri:noRegion>School in Advanced Optical Technologies (SAOT)</wicri:noRegion>
<wicri:noRegion>School in Advanced Optical Technologies (SAOT)</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1">
<inist:fA14 i1="02">
<s1>Friedrich-Alexander Erlangen-Nuremberg University</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Allemagne</country>
<wicri:noRegion>91052</wicri:noRegion>
<wicri:noRegion>Friedrich-Alexander Erlangen-Nuremberg University</wicri:noRegion>
<wicri:noRegion>Friedrich-Alexander Erlangen-Nuremberg University</wicri:noRegion>
</affiliation>
</author>
<author>
<name sortKey="Limon, Ofer" uniqKey="Limon O">Ofer Limon</name>
<affiliation wicri:level="1">
<inist:fA14 i1="03">
<s1>Faculty of Engineering and nanotechnology center, Bar-Ilan University</s1>
<s2>Ramat-Gan 52900</s2>
<s3>ISR</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Israël</country>
<wicri:noRegion>Ramat-Gan 52900</wicri:noRegion>
</affiliation>
</author>
<author>
<name sortKey="Businaro, Luca" uniqKey="Businaro L">Luca Businaro</name>
<affiliation wicri:level="1">
<inist:fA14 i1="04">
<s1>CNR, Institute for Photonics and Nanotechnology, Via Cineto Romano 42</s1>
<s2>00156 Rome</s2>
<s3>ITA</s3>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
</inist:fA14>
<country>Italie</country>
<placeName>
<settlement type="city">Rome</settlement>
<region nuts="2">Latium</region>
</placeName>
</affiliation>
</author>
<author>
<name sortKey="Ciasca, Gabriele" uniqKey="Ciasca G">Gabriele Ciasca</name>
<affiliation wicri:level="1">
<inist:fA14 i1="04">
<s1>CNR, Institute for Photonics and Nanotechnology, Via Cineto Romano 42</s1>
<s2>00156 Rome</s2>
<s3>ITA</s3>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
</inist:fA14>
<country>Italie</country>
<placeName>
<settlement type="city">Rome</settlement>
<region nuts="2">Latium</region>
</placeName>
</affiliation>
</author>
<author>
<name sortKey="Azugi, Yhonathan" uniqKey="Azugi Y">Yhonathan Azugi</name>
<affiliation wicri:level="1">
<inist:fA14 i1="03">
<s1>Faculty of Engineering and nanotechnology center, Bar-Ilan University</s1>
<s2>Ramat-Gan 52900</s2>
<s3>ISR</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Israël</country>
<wicri:noRegion>Ramat-Gan 52900</wicri:noRegion>
</affiliation>
</author>
<author>
<name sortKey="Gerardino, Annamaria" uniqKey="Gerardino A">Annamaria Gerardino</name>
<affiliation wicri:level="1">
<inist:fA14 i1="04">
<s1>CNR, Institute for Photonics and Nanotechnology, Via Cineto Romano 42</s1>
<s2>00156 Rome</s2>
<s3>ITA</s3>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
</inist:fA14>
<country>Italie</country>
<placeName>
<settlement type="city">Rome</settlement>
<region nuts="2">Latium</region>
</placeName>
</affiliation>
</author>
<author>
<name sortKey="Zalevsky, Zeev" uniqKey="Zalevsky Z">Zeev Zalevsky</name>
<affiliation wicri:level="1">
<inist:fA14 i1="01">
<s1>School in Advanced Optical Technologies (SAOT)</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Allemagne</country>
<wicri:noRegion>91052</wicri:noRegion>
<wicri:noRegion>School in Advanced Optical Technologies (SAOT)</wicri:noRegion>
<wicri:noRegion>School in Advanced Optical Technologies (SAOT)</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1">
<inist:fA14 i1="02">
<s1>Friedrich-Alexander Erlangen-Nuremberg University</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Allemagne</country>
<wicri:noRegion>91052</wicri:noRegion>
<wicri:noRegion>Friedrich-Alexander Erlangen-Nuremberg University</wicri:noRegion>
<wicri:noRegion>Friedrich-Alexander Erlangen-Nuremberg University</wicri:noRegion>
</affiliation>
<affiliation wicri:level="1">
<inist:fA14 i1="03">
<s1>Faculty of Engineering and nanotechnology center, Bar-Ilan University</s1>
<s2>Ramat-Gan 52900</s2>
<s3>ISR</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</inist:fA14>
<country>Israël</country>
<wicri:noRegion>Ramat-Gan 52900</wicri:noRegion>
</affiliation>
</author>
</titleStmt>
<publicationStmt>
<idno type="inist">13-0129395</idno>
<date when="2013">2013</date>
<idno type="stanalyst">PASCAL 13-0129395 INIST</idno>
<idno type="RBID">Pascal:13-0129395</idno>
<idno type="wicri:Area/Main/Corpus">001057</idno>
<idno type="wicri:Area/Main/Repository">000D07</idno>
</publicationStmt>
<seriesStmt>
<idno type="ISSN">0167-9317</idno>
<title level="j" type="abbreviated">Microelectron. eng.</title>
<title level="j" type="main">Microelectronic engineering</title>
</seriesStmt>
</fileDesc>
<profileDesc>
<textClass>
<keywords scheme="KwdEn" xml:lang="en">
<term>Bragg reflection</term>
<term>Doped materials</term>
<term>Electrooptical modulator</term>
<term>Free electron</term>
<term>Indium oxide</term>
<term>Integrated optics</term>
<term>Refraction index</term>
<term>Silicon</term>
<term>Single mode waveguide</term>
<term>Tin addition</term>
<term>Waveguide</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr">
<term>Modulateur électrooptique</term>
<term>Guide onde monomode</term>
<term>Addition étain</term>
<term>Optique intégrée</term>
<term>Electron libre</term>
<term>Indice réfraction</term>
<term>Réflexion Bragg</term>
<term>Guide onde</term>
<term>Silicium</term>
<term>Oxyde d'indium</term>
<term>Matériau dopé</term>
<term>ITO</term>
</keywords>
</textClass>
</profileDesc>
</teiHeader>
<front>
<div type="abstract" xml:lang="en">In this paper we present a design as well as the fabrication procedure of a new type of electro-optical modulator based on plasma dispersion effect. The device consists from a regular single mode silicon waveguide and periodically patterned electrodes made out an indium thin oxide (ITO) located along both sides of the optical core through which the photonic signal is propagating. By applying voltage on the electrodes a periodic change in the free electrons is occurred along the optical core. This change affects both the imaginary and real part of the refractive index resulting in the generation of periodic change in the refractive index that creates an effective Bragg reflector. Different fabrication strategies are reported.</div>
</front>
</TEI>
<inist>
<standard h6="B">
<pA>
<fA01 i1="01" i2="1">
<s0>0167-9317</s0>
</fA01>
<fA02 i1="01">
<s0>MIENEF</s0>
</fA02>
<fA03 i2="1">
<s0>Microelectron. eng.</s0>
</fA03>
<fA05>
<s2>105</s2>
</fA05>
<fA08 i1="01" i2="1" l="ENG">
<s1>Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon</s1>
</fA08>
<fA11 i1="01" i2="1">
<s1>SHAHMOON (Asaf)</s1>
</fA11>
<fA11 i1="02" i2="1">
<s1>LIMON (Ofer)</s1>
</fA11>
<fA11 i1="03" i2="1">
<s1>BUSINARO (Luca)</s1>
</fA11>
<fA11 i1="04" i2="1">
<s1>CIASCA (Gabriele)</s1>
</fA11>
<fA11 i1="05" i2="1">
<s1>AZUGI (Yhonathan)</s1>
</fA11>
<fA11 i1="06" i2="1">
<s1>GERARDINO (Annamaria)</s1>
</fA11>
<fA11 i1="07" i2="1">
<s1>ZALEVSKY (Zeev)</s1>
</fA11>
<fA14 i1="01">
<s1>School in Advanced Optical Technologies (SAOT)</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</fA14>
<fA14 i1="02">
<s1>Friedrich-Alexander Erlangen-Nuremberg University</s1>
<s2>Erlangen 91052</s2>
<s3>DEU</s3>
<sZ>1 aut.</sZ>
<sZ>7 aut.</sZ>
</fA14>
<fA14 i1="03">
<s1>Faculty of Engineering and nanotechnology center, Bar-Ilan University</s1>
<s2>Ramat-Gan 52900</s2>
<s3>ISR</s3>
<sZ>2 aut.</sZ>
<sZ>5 aut.</sZ>
<sZ>7 aut.</sZ>
</fA14>
<fA14 i1="04">
<s1>CNR, Institute for Photonics and Nanotechnology, Via Cineto Romano 42</s1>
<s2>00156 Rome</s2>
<s3>ITA</s3>
<sZ>3 aut.</sZ>
<sZ>4 aut.</sZ>
<sZ>6 aut.</sZ>
</fA14>
<fA20>
<s1>107-112</s1>
</fA20>
<fA21>
<s1>2013</s1>
</fA21>
<fA23 i1="01">
<s0>ENG</s0>
</fA23>
<fA43 i1="01">
<s1>INIST</s1>
<s2>20003</s2>
<s5>354000502455220210</s5>
</fA43>
<fA44>
<s0>0000</s0>
<s1>© 2013 INIST-CNRS. All rights reserved.</s1>
</fA44>
<fA45>
<s0>10 ref.</s0>
</fA45>
<fA47 i1="01" i2="1">
<s0>13-0129395</s0>
</fA47>
<fA60>
<s1>P</s1>
</fA60>
<fA61>
<s0>A</s0>
</fA61>
<fA64 i1="01" i2="1">
<s0>Microelectronic engineering</s0>
</fA64>
<fA66 i1="01">
<s0>NLD</s0>
</fA66>
<fC01 i1="01" l="ENG">
<s0>In this paper we present a design as well as the fabrication procedure of a new type of electro-optical modulator based on plasma dispersion effect. The device consists from a regular single mode silicon waveguide and periodically patterned electrodes made out an indium thin oxide (ITO) located along both sides of the optical core through which the photonic signal is propagating. By applying voltage on the electrodes a periodic change in the free electrons is occurred along the optical core. This change affects both the imaginary and real part of the refractive index resulting in the generation of periodic change in the refractive index that creates an effective Bragg reflector. Different fabrication strategies are reported.</s0>
</fC01>
<fC02 i1="01" i2="X">
<s0>001D03G02C2</s0>
</fC02>
<fC02 i1="02" i2="X">
<s0>001D03G02C1</s0>
</fC02>
<fC02 i1="03" i2="3">
<s0>001B70H20C</s0>
</fC02>
<fC03 i1="01" i2="X" l="FRE">
<s0>Modulateur électrooptique</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="X" l="ENG">
<s0>Electrooptical modulator</s0>
<s5>01</s5>
</fC03>
<fC03 i1="01" i2="X" l="SPA">
<s0>Modulador electro-óptico</s0>
<s5>01</s5>
</fC03>
<fC03 i1="02" i2="X" l="FRE">
<s0>Guide onde monomode</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="X" l="ENG">
<s0>Single mode waveguide</s0>
<s5>02</s5>
</fC03>
<fC03 i1="02" i2="X" l="SPA">
<s0>Guía onda monomodo</s0>
<s5>02</s5>
</fC03>
<fC03 i1="03" i2="X" l="FRE">
<s0>Addition étain</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="X" l="ENG">
<s0>Tin addition</s0>
<s5>03</s5>
</fC03>
<fC03 i1="03" i2="X" l="SPA">
<s0>Adición estaño</s0>
<s5>03</s5>
</fC03>
<fC03 i1="04" i2="X" l="FRE">
<s0>Optique intégrée</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="X" l="ENG">
<s0>Integrated optics</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="X" l="SPA">
<s0>Optica integrada</s0>
<s5>04</s5>
</fC03>
<fC03 i1="05" i2="X" l="FRE">
<s0>Electron libre</s0>
<s5>05</s5>
</fC03>
<fC03 i1="05" i2="X" l="ENG">
<s0>Free electron</s0>
<s5>05</s5>
</fC03>
<fC03 i1="05" i2="X" l="SPA">
<s0>Electrón libre</s0>
<s5>05</s5>
</fC03>
<fC03 i1="06" i2="X" l="FRE">
<s0>Indice réfraction</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="ENG">
<s0>Refraction index</s0>
<s5>06</s5>
</fC03>
<fC03 i1="06" i2="X" l="SPA">
<s0>Indice refracción</s0>
<s5>06</s5>
</fC03>
<fC03 i1="07" i2="X" l="FRE">
<s0>Réflexion Bragg</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="ENG">
<s0>Bragg reflection</s0>
<s5>07</s5>
</fC03>
<fC03 i1="07" i2="X" l="SPA">
<s0>Reflexión Bragg</s0>
<s5>07</s5>
</fC03>
<fC03 i1="08" i2="X" l="FRE">
<s0>Guide onde</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="ENG">
<s0>Waveguide</s0>
<s5>08</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA">
<s0>Guía onda</s0>
<s5>08</s5>
</fC03>
<fC03 i1="09" i2="X" l="FRE">
<s0>Silicium</s0>
<s2>NC</s2>
<s5>22</s5>
</fC03>
<fC03 i1="09" i2="X" l="ENG">
<s0>Silicon</s0>
<s2>NC</s2>
<s5>22</s5>
</fC03>
<fC03 i1="09" i2="X" l="SPA">
<s0>Silicio</s0>
<s2>NC</s2>
<s5>22</s5>
</fC03>
<fC03 i1="10" i2="X" l="FRE">
<s0>Oxyde d'indium</s0>
<s5>23</s5>
</fC03>
<fC03 i1="10" i2="X" l="ENG">
<s0>Indium oxide</s0>
<s5>23</s5>
</fC03>
<fC03 i1="10" i2="X" l="SPA">
<s0>Indio óxido</s0>
<s5>23</s5>
</fC03>
<fC03 i1="11" i2="3" l="FRE">
<s0>Matériau dopé</s0>
<s5>46</s5>
</fC03>
<fC03 i1="11" i2="3" l="ENG">
<s0>Doped materials</s0>
<s5>46</s5>
</fC03>
<fC03 i1="12" i2="X" l="FRE">
<s0>ITO</s0>
<s4>INC</s4>
<s5>82</s5>
</fC03>
<fN21>
<s1>105</s1>
</fN21>
<fN44 i1="01">
<s1>OTO</s1>
</fN44>
<fN82>
<s1>OTO</s1>
</fN82>
</pA>
</standard>
</inist>
</record>

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